Study on the Coating Tests of Semiconductor Wafer Polymers
Introducing various application notes for semiconductor strength testing, surface inspection, environmental testing, and more.
Silicon carbide wafers for semiconductors, which require hundreds of processes, are coated with metal. The adhesion strength of this metal coating and the compatibility between the coating and the substrate can lead to various issues. Nanovia, a company headquartered in California, USA, has been involved in semiconductor inspection through research and development and quality control. Here, we will discuss the mechanical testing machine called the Nanovia indenter, and introduce application notes on the test results related to actual wafer coatings, high-temperature applications, and polymer coatings.
basic information
In the verification of the mechanical strength of metal coatings on wafers, we introduce test methods such as indentation tests, scratch tests, and reciprocating scratch tests. In the micro-scratch tests on silicon wafers, we discuss adhesive failure of polymer coatings, cohesive failure, and critical loads. The multi-layer thin film scratch resistance tests examine adhesive failure, cohesive failure of the multi-layer coatings, and their impact on the substrate. In the friction evaluation of self-cleaning glass coatings, we assess friction behavior using wet and dry indenters with Kimwipes. The high-temperature arc reciprocating tests consider scratch tests with a tribometer at high temperatures, particularly discussing differences from linear motion. This research is conducted at 800°C, but the equipment can handle measurements up to 1,100°C. We hope this will be useful for your research and development.
Price range
Delivery Time
Model number/Brand name
Nanobia Corporation
Applications/Examples of results
Strength testing, surface inspection, environmental testing of semiconductors, etc.
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Our company handles products that are adopted by world-class companies. These products incorporate cutting-edge technologies not found in Japanese products, enabling the promotion of rationalization and cost reduction in manufacturing and development environments, and they are guaranteed to bring benefits to the companies that implement them. Additionally, we provide support for overseas products with the same rapid response as domestic manufacturers. ◎ Dynamic viscoelasticity measurement device ◎ Stress relaxation measurement device ◎ Drop weight impact testing machine ◎ Multicolor light 3D optical profiler ◎ Nano/micro indenter ◎ Tribometer ◎ Moisture meter for polymers ◎ Twin capillary rheometer for melt property material development ◎ Flow analysis software ◎ Molding analysis software ◎ Ultra-precision feeder ◎ Mass flow quantitative feeder ◎ Automatic adjustment weight-type blender ◎ Dehumidifying dryer for polymers ◎ Color spectrometer ◎ Equipment for shortening molding cycles ◎ Rubber measurement-related equipment Dynamic measurement + vulcanization testing machine Rheometer Carbon dispersion meter Mooney viscometer Hardness and density meter Density and specific gravity meter Specific gravity meter for uncured rubber Durometer Durability and fatigue testing machine Rebound tester Wear testing machine ◎ Comprehensive valve manufacturer