Real Nano 3D Measurement Device for Semiconductors
Achieving nanoscale "actual measurement" with optical "vertical focus."
In the semiconductor industry, the miniaturization of wiring is progressing, and accurate inspection of wiring in the manufacturing process is essential. Wire disconnections and short circuits can significantly degrade product performance, necessitating high-precision measurement technology. Our Real Nano 3D measurement system accurately measures surface shapes at the nano level and contributes to solving challenges in wiring inspection. 【Application Scenarios】 - Measurement of surface roughness of semiconductor wiring - Measurement of wiring shapes - Detection of foreign object adhesion 【Benefits of Implementation】 - Improved accuracy of wiring inspection - Reduction of defective products - Enhanced product quality
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【Features】 - High-speed continuous scanning - Optical profiler - Actual measurement (without stitching) - Easy sample preparation - Nanovia's unique new method "Multicolor Light Sensor Measurement" 【Our Strengths】 We handle products adopted by world-class companies and provide rapid support comparable to domestic manufacturers.
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Nanovia Corporation
Applications/Examples of results
◎Distortion and curvature measured ◎High-speed processing of large areas ◎No refocusing required ◎Sharp images ◎No sample pretreatment ◎Measurement possible for any color ▶Non-contact measurement ▶Maximum vertical resolution = 1nm ▶Maximum surface angle = 87° ▶No data stitching ◎Surface roughness ■Ra measurement in 1 second ■Various materials and surface complexities (3D or 2D) ■Automotive roughness finishing standards ◎Texture/Grain ■Isotropic and anisotropic surfaces ■Analysis of unevenness ◎Surface profile ■Direct comparison with CAD geometry ■Curvature, radius, angle ■Lateral dimensions ■Study of drill bits ■Study of cutting tools ◎Step height/Thickness ■Measuring transparent materials as they are ■Thickness of transparent films and coatings up to 20nm ■Steps from 20nm to 25mm ◎Volume/Area ■Difference in surface and volume loss ■Corrosion analysis ■Motif and granularity analysis ◎Flatness/Warping ■Flatness from 1um to 500mm (without correction)
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Our company handles products that are adopted by world-class companies. These products incorporate cutting-edge technologies not found in Japanese products, enabling the promotion of rationalization and cost reduction in manufacturing and development environments, and they are guaranteed to bring benefits to the companies that implement them. Additionally, we provide support for overseas products with the same rapid response as domestic manufacturers. ◎ Dynamic viscoelasticity measurement device ◎ Stress relaxation measurement device ◎ Drop weight impact testing machine ◎ Multicolor light 3D optical profiler ◎ Nano/micro indenter ◎ Tribometer ◎ Moisture meter for polymers ◎ Twin capillary rheometer for melt property material development ◎ Flow analysis software ◎ Molding analysis software ◎ Ultra-precision feeder ◎ Mass flow quantitative feeder ◎ Automatic adjustment weight-type blender ◎ Dehumidifying dryer for polymers ◎ Color spectrometer ◎ Equipment for shortening molding cycles ◎ Rubber measurement-related equipment Dynamic measurement + vulcanization testing machine Rheometer Carbon dispersion meter Mooney viscometer Hardness and density meter Density and specific gravity meter Specific gravity meter for uncured rubber Durometer Durability and fatigue testing machine Rebound tester Wear testing machine ◎ Comprehensive valve manufacturer