List of Surface Inspection Technology Materials for Semiconductors
Support for foreign object detection in semiconductor manufacturing.
In the semiconductor industry, thorough management of foreign matter contamination in the manufacturing process is required to improve product quality and yield. Especially in semiconductor devices that are becoming increasingly miniaturized, even tiny foreign particles can significantly degrade product performance. Nanovia's surface inspection technology documentation contributes to solving the challenges of foreign matter detection. 【Usage Scenarios】 - Foreign matter inspection on wafer surfaces - Foreign matter inspection on masks and reticles - Identification of sources of foreign matter in the manufacturing process 【Benefits of Implementation】 - Reduction of defective products due to foreign matter - Improvement of yield - Increased efficiency in quality control
basic information
**Features** - High-precision surface shape measurement using cutting-edge 3D profilometers - Material property evaluation using nanoindenters - Friction and wear property evaluation using tribometers - Scratch resistance evaluation using scratch testers - Provision of test data from our laboratories around the world **Our Strengths** - Handling products from world-class manufacturers - Rapid support system comparable to domestic manufacturers - Expertise in measurement devices, testing machines, and production rationalization equipment
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Nanovia Corporation
Applications/Examples of results
■Real Nano 3D Profilometer Our lab services provide surface profiling to accurately measure "surface roughness," "finish," "shape," and "texture." ■Nanoindentation & Scratch Testing Nanoindentation and scratch testing are methods for evaluating the mechanical properties of materials at micro to nanoscale. ■Friction and Wear Testing We offer a wide range of solutions for friction testing, wear testing, and tribology evaluation, from tests compliant with international standards such as ASTM and ISO to custom tests that replicate your specific applications and usage environments. ■Surface Topology & Chemical Analysis Services We provide analytical services to accurately evaluate the shape characteristics (topology) and chemical properties of material surfaces.
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Our company handles products that are adopted by world-class companies. These products incorporate cutting-edge technologies not found in Japanese products, enabling the promotion of rationalization and cost reduction in manufacturing and development environments, and they are guaranteed to bring benefits to the companies that implement them. Additionally, we provide support for overseas products with the same rapid response as domestic manufacturers. ◎ Dynamic viscoelasticity measurement device ◎ Stress relaxation measurement device ◎ Drop weight impact testing machine ◎ Multicolor light 3D optical profiler ◎ Nano/micro indenter ◎ Tribometer ◎ Moisture meter for polymers ◎ Twin capillary rheometer for melt property material development ◎ Flow analysis software ◎ Molding analysis software ◎ Ultra-precision feeder ◎ Mass flow quantitative feeder ◎ Automatic adjustment weight-type blender ◎ Dehumidifying dryer for polymers ◎ Color spectrometer ◎ Equipment for shortening molding cycles ◎ Rubber measurement-related equipment Dynamic measurement + vulcanization testing machine Rheometer Carbon dispersion meter Mooney viscometer Hardness and density meter Density and specific gravity meter Specific gravity meter for uncured rubber Durometer Durability and fatigue testing machine Rebound tester Wear testing machine ◎ Comprehensive valve manufacturer