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High-precision mass flow meter

A lineup ranging from ultra-low flow (0.5 SCCM) to high flow (12,000 SLPM).

Supports mixed gases! Standard features include analog output, RS-232C communication, and a backlit LCD display. Current delivery time is 8 weeks.

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRQ Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

Achieve fast response with the laminar flow method (differential pressure type)! A wide range of models is available from low flow to high flow. Current delivery time is 4 weeks.

【Lineup (Excerpt)】 ■M Series (Standard Type) ■MS Series (Corrosive Gas / Refrigerant Gas Compatible) ■MW Series (Low Pressure Loss Type) ■MQ Series (High Pressure Type) ■MB/MBS/MWB Series (Portable Mass Flow Meters) ■PCU Series (Portable Calibration Unit) *For more details, please refer to the PDF document or feel free to contact us.

Supports 98 types of gases, including mixed gases. Batch control is also possible by adding an accumulation option.

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (For Corrosive Gases/Refrigerant Gases) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRQ Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

A flow meter that can accurately measure high pressure, low flow, and fluids with various characteristics! ◆ Pressure range: up to 4,000 PSIA ◆ Minimum flow range: 0.2g/h

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRQ Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

High-flow industrial gas mixer for facility operations: Benefits for packaging lines and compliance.

Gas Mixing System for Laboratory and High Flow Operations A flexible gas mixing system that accommodates hundreds of applications. It is a highly customizable platform capable of generating mixed gases easily from high flow operations with a single recipe to complex low flow research and development dilutions. It can mix up to 10 types of gas streams, producing a total flow rate of up to 120,000 SLPM, and is robust enough for industrial applications. Consistent and accurate gas mixing ratios are controlled solely by Alicat MFCs. The channels are match-tuned, allowing for variable flow mixing, outlet pressure control, and rapid response to changing process conditions. ◆ The target mix accuracy is good at ±0.6% ◆ Individual MFCs (T63) have a fast control response of up to 25ms ◆ Equipped with a library of 49 selectable gas calibrations, some of which include corrosives and refrigerants ◆ Blend pure gases or multi-component mixed gases (capable of managing up to 10 elemental gases simultaneously) ◆ Built-in system computer with integrated outlet pressure sensing module ◆ High-resolution touchscreen interface for live, interactive multivariate data monitoring

Open form factor 10-channel mixer for all flow applications (rack mount): for MAP packaging, etc.

Gas Mixing System for Laboratory and High Flow Operations A flexible gas mixing system that accommodates hundreds of applications. It is a highly customizable platform capable of generating mixed gases easily from high flow operations with a single recipe to complex low flow research and development dilutions. It can mix up to 10 types of gas streams with a total flow rate of up to 120,000 SLPM, providing sufficient robustness for industrial applications. Consistent and accurate gas mixing ratios are controlled solely by the Alicat MFC. The channels are match-tuned, allowing for variable flow mixing, outlet pressure control, and rapid response to changing process conditions. ◆ Target mix accuracy of 0.6% ± is excellent ◆ Individual MFC (T63) has a fast control response of up to 25 ms ◆ Equipped with a library of 49 selectable gas calibrations, some of which include corrosives and refrigerants ◆ Blend pure gases or multi-component mixed gases (capable of managing up to 10 elemental gases simultaneously) ◆ Built-in system computer with integrated outlet pressure sensing module ◆ High-resolution touchscreen interface for live interactive multivariate data monitoring

Open form factor 10-channel mixer for all flow applications (desktop type): for MAP packaging, etc.

Gas Mixing System for Laboratory and High Flow Operations A gas mixing system that flexibly accommodates hundreds of applications. It is a highly customizable platform capable of generating mixed gases easily, from high flow operations with a single recipe to complex low flow research and development dilutions. It can mix up to 10 types of gas streams with a total flow rate of up to 120,000 SLPM, providing sufficient robustness for industrial applications. Consistent and accurate gas mixing ratios are controlled solely by the Alicat MFC. The channels are match-tuned, allowing for variable flow mixing, outlet pressure control, and rapid response to changing process conditions. ◆ The target mix has a good accuracy of ±0.6% ◆ Individual MFCs (T63) have a fast control response of up to 25ms ◆ Equipped with a library of 49 selectable gas calibrations, some of which include corrosives and refrigerants ◆ Blend pure gases or multi-component mixed gases (capable of managing up to 10 elemental gases simultaneously) ◆ Built-in system computer with integrated outlet pressure sensing module ◆ High-resolution touchscreen interface for live interactive multivariate data monitoring

All-in-one 6-channel mixer for low to medium flow applications: for MAP packaging, etc.

Gas Mixing System for Laboratory and High Flow Operations A flexible gas mixing system that accommodates hundreds of applications. It is a highly customizable platform capable of generating high flow operations with a single recipe to complex low flow research and development dilutions. It can easily mix up to 10 types of gas streams with a total flow rate of up to 120,000 SLPM, providing sufficient robustness for industrial applications. Consistent and accurate gas mixing ratios are controlled solely by the Alicat MFC. The channels are match-tuned, allowing for variable flow mixing, outlet pressure control, and rapid response to changing process conditions. ◆ The target mix has a good accuracy of ±0.6% ◆ Individual MFCs (T63) have a fast control response of up to 25 ms ◆ Equipped with a library of 49 selectable gas calibrations, some of which include corrosives and refrigerants ◆ Blend pure gases or multi-component mixed gases (capable of managing up to 10 elemental gases simultaneously) ◆ Built-in system computer with integrated outlet pressure sensing module ◆ High-resolution touchscreen interface for live interactive multivariate data monitoring

All-in-one 6-channel mixer for low-flow applications: for MAP packaging, etc.

Gas Mixing System for Laboratory and High Flow Operations A gas mixing system that flexibly accommodates hundreds of applications. It is a highly customizable platform capable of generating mixed gases easily from high flow operations with a single recipe to complex low flow research and development dilutions. It can mix up to 10 types of gas streams with a total flow rate of up to 120,000 SLPM, providing sufficient robustness for industrial applications. Consistent and accurate gas mixing ratios are controlled solely by Alicat MFCs. The channels are match-tuned, allowing for variable flow mixing, outlet pressure control, and rapid response to changing process conditions. ◆ The target mix has a good accuracy of 0.6% ± ◆ Individual MFCs (T63) have a fast control response of up to 25 ms ◆ Equipped with a library of 49 selectable gas calibrations, some of which include corrosives and refrigerants ◆ Blend pure gases or multi-component mixed gases (capable of managing up to 10 elemental gases simultaneously) ◆ Built-in system computer with integrated outlet pressure sensing module ◆ High-resolution touchscreen interface for live interactive multivariate data monitoring

Achieve high-speed response with the laminar flow method (differential pressure type)! A wide range of models is available, from low flow rates to high flow rates. Delivery time is approximately 4 weeks.

【Lineup (Excerpt)】 ■M Series (Standard Type) ■MS Series (Corrosive Gas/Refrigerant Gas Compatible) ■MW Series (Low Pressure Loss Type) ■MQ Series (High Pressure Type) ■MB/MBS/MWB Series (Portable Mass Flow Meters) ■PCU Series (Portable Calibration Unit) *For more details, please refer to the PDF document or feel free to contact us.

Stable pressure control with high-speed response. Standard features include analog output and RS-232C communication. High pressure accuracy of ±(0.30% FS).

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRW Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

A mass flow controller that measures with a very small differential pressure, has very low pressure loss, and is ideal for use in low-pressure environments. Current delivery time is approximately 4 weeks.

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRW Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

A mass flow meter that can measure with extremely small differential pressure. Achieves fast response through the laminar flow method (differential pressure type)! Current delivery time is approximately 4 weeks.

【Lineup (Excerpt)】 ■M Series (Standard Type) ■MS Series (Corrosive Gas/Refrigerant Gas Compatible) ■MW Series (Low Pressure Loss Type) ■MQ Series (High Pressure Type) ■MB/MBS/MWB Series (Portable Mass Flow Meters) ■PCU Series (Portable Calibration Unit) *For more details, please refer to the PDF document or feel free to contact us.

BASIS series! There are 8 types of gases supported, including Air.

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRQ Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

Achieve fast response with the laminar flow method (differential pressure type)! We offer a lineup ranging from 0.5 CCM to 10 LPM.

【Other Features】 - Three methods are available for setting the control flow rate, which can be done via the front switch, analog input, or communication. - Equipped with a highly accurate differential pressure sensor for precise flow measurement. - Issuance of traceability system diagrams is also possible. - Features a backlit LCD display for good visibility. - The backlight can be easily operated ON/OFF using the front switch. - Simultaneous display of volumetric flow, temperature, and pressure. - An additional second analog output is also possible. - Communication outputs volumetric flow, temperature, and pressure, allowing connection to computers and other communication-compatible devices for monitoring and logging. - As an additional option, cumulative flow measurement is available, and batch control is possible with the controller. - Equipped with a lithium-ion battery, allowing approximately 18 hours of operation on a full charge (when using monochrome LCD; optional). *For more details, please refer to the PDF document or feel free to contact us.

Achieving fast response with the laminar flow method (differential pressure type)! A lineup is available from 0.5 CCM to 10 LPM.

【Other Features】 - Three methods are available for setting the control flow rate: via the front switch, analog input, or communication. - Equipped with a highly accurate differential pressure sensor for precise flow measurement. - Issuance of traceability system diagrams is also possible. - Features an LCD display with a backlight for good visibility. - The backlight can be easily operated ON/OFF using the front switch. - Simultaneous display of volumetric flow, temperature, and pressure. - An additional second analog output is also available. - Communication outputs volumetric flow, temperature, and pressure, allowing connection to communication-compatible devices such as computers for monitoring and logging. - As an additional option, cumulative flow measurement is possible, and batch control can be performed with the controller. - Equipped with a lithium-ion battery, allowing approximately 18 hours of operation on a full charge (when using monochrome LCD; optional). *For more details, please refer to the PDF document or feel free to contact us.

AriCat BIO Series! Reliable, adaptable, and compatible flow control.

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRQ Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

Equipped with two valves, it allows for bidirectional control. Control can be performed using pressurization, negative pressure, or vacuum. Models that accommodate corrosive gases and low-pressure loss are also available in the lineup.

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRQ Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

The maximum operating pressure is 320 PSIA (2.2 MPaA). The pressure resistance is 400 PSIA (2.7 MPaA). It is also compatible with mixed gases!

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (For Corrosive Gases/Refrigerant Gases) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRQ Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

Supports mixed gases! Equipped with standard analog output, RS-232C communication, and a backlit LCD display.

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (For Corrosive Gases / Refrigerant Gases) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRW Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

Achieving high-speed response with the laminar flow method (differential pressure type)! A wide range of models available from low flow to high flow.

【Product Lineup (Excerpt)】 ■M Series (Standard Type) ■MS Series (Corrosive Gas/Refrigerant Gas Compatible) ■MW Series (Low Pressure Loss Type) ■MQ Series (High Pressure Type) ■MB/MBS/MWB Series (Portable Mass Flow Meters) ■PCU Series (Portable Calibration Unit) *For more details, please refer to the PDF document or feel free to contact us.

Achieving high-speed response with the laminar flow method (differential pressure type)! A wide range of models available from low flow to high flow.

【Lineup (Excerpt)】 ■M Series (Standard Type) ■MS Series (Corrosive Gas/Refrigerant Gas Compatible) ■MW Series (Low Pressure Loss Type) ■MQ Series (High Pressure Type) ■MB/MBS/MWB Series (Portable Mass Flow Meters) ■PCU Series (Portable Calibration Unit) *For more details, please refer to the PDF document or feel free to contact us.

ALICAT's mass flow controller with MCV/MCVS series (equipped with a vacuum shut-off valve).

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRW Series (High Pressure Type) ■ MCE/MCES Series (SEMI Standard) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF materials or feel free to contact us.

Mass flow controller with built-in valve from ALICAT, compliant with SEMI standards.

【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRW Series (High Pressure Type) ■ MCE/MCES Series (SEMI Standards) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF materials or feel free to contact us.

Flow model: 40g/h High pressure, low flow, a flow meter that can accurately measure fluids with various characteristics! ◆ Pressure range: up to 4,000 PSIA ◆

【Product Lineup】Coriolis ■40g/h ■1kg/h ■10kg/h ■100kg/h 【Product Lineup】Mass Flow ■MC/MCP/MCR Series (Standard Type) ■MCS/MCRS Series (For Corrosive Gases/Refrigerant Gases) ■MCW/MCRW Series (Low Pressure Loss Type) ■MCQ/MCRQ Series (High Pressure Type) ■MCV/MCVS Series (With Shut-off Valve) ■MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

Flow model: 10kg/h High pressure, low flow, a flow meter that can accurately measure fluids with various characteristics! ◆ Pressure range: up to 4,000 PSIA ◆

【Lineup】Coriolis ■40g/h ■1kg/h ■10kg/h ■100kg/h 【Lineup】Mass Flow ■MC/MCP/MCR Series (Standard Type) ■MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■MCW/MCRW Series (Low Pressure Loss Type) ■MCQ/MCRQ Series (High Pressure Type) ■MCV/MCVS Series (Equipped with Shut-off Valve) ■MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

Flow model: 100kg/h High pressure, low flow, a flow meter that can accurately measure fluids with various characteristics! ◆ Pressure range: up to 4,000 PSIA ◆

【Lineup】Coriolis ■40g/h ■1kg/h ■10kg/h ■100kg/h 【Lineup】Mass Flow ■MC/MCP/MCR Series (Standard Type) ■MCS/MCRS Series (For Corrosive Gases/Refrigerant Gases) ■MCW/MCRW Series (Low Pressure Loss Type) ■MCQ/MCRQ Series (High Pressure Type) ■MCV/MCVS Series (With Shut-off Valve) ■MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.

Flow model: 1kg/h High pressure, low flow, a flow meter that can accurately measure fluids with various characteristics! ◆ Pressure range: up to 4,000 PSIA ◆

【Lineup】Coriolis ■40g/h ■1kg/h ■10kg/h ■100kg/h 【Lineup】Mass Flow ■MC/MCP/MCR Series (Standard Type) ■MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■MCW/MCRW Series (Low Pressure Loss Type) ■MCQ/MCRQ Series (High Pressure Type) ■MCV/MCVS Series (Equipped with Shut-off Valve) ■MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.