Nano positioning stage" "Laser interferometric displacement sensor
Achieving high-quality semiconductor manufacturing with nano-order high-precision positioning and displacement measurement using a sensor resolution of 1 picometer.
Our company handles "nano positioning stages" and "laser interferometric displacement sensors" for semiconductor manufacturing equipment from attocube. We offer a range of products that meet various needs, including stages capable of achieving high-precision positioning and supporting loads of several kilograms. Our products are compatible with closed-loop control, enabling precise control. They are also very compact, making integration into equipment easy. 【Product Lineup】 "Nano Positioning Stage" - Compatible with high vacuum and ultra-high vacuum - High precision and high resolution positioning even in harsh environments - Stages can be constructed with up to 6 axes "Laser Interferometric Displacement Sensor IDS3010" - High precision and high resolution in the picometer range - Ultra-fast operation at 10 MHz, with a maximum operating distance of 5 meters - Compatible with various materials and environments such as ultra-high vacuum and high magnetic fields *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
basic information
【Nano Positioner & High-Precision Stage】 * Compatible with ultra-high vacuum, high magnetic fields, and non-magnetic applications * Load capacity: Up to several kg with nanometer-scale resolution * Closed-loop control possible: High speed, high resolution, and high positional repeatability 【Interferometric Linear Displacement Sensor】 * Pico-order resolution and long operating distance (5m) * Ultra-fast (10MHz) * Compatible with various materials and extreme environments (ultra-high vacuum, high magnetic fields)
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Applications/Examples of results
【Machine Tools (QA, QC)】 * Ultra-precise inline travel real-time characteristic control using stage guides * Automatic volume correction of machine tools and CMM * Motion capture with built-in sensors * Motion tracking of three-dimensional measuring machines * Monitoring, analysis, and correction of vibrations and micro-vibrations 【Semiconductor Manufacturing Equipment】 * Dynamic motion control of wafer stages * Beam alignment for measurement and inspection * Wafer flatness measurement * Positioning of beam apertures and filters in lithography and measurement processes * Ultra-precise position tracking in photolithography 【Photonics】 * Ultra-precise positioning of fiber arrays * Laser beam steering and alignment of optical components in optical measurement * Positioning and alignment within high-resolution microscopes
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Nihon Laser, founded in 1968, is the oldest and largest specialized company in Japan for lasers and optical-related products, having grown alongside advancements in laser technology with the support of our customers as a pioneer in the laser trading industry. We allocate just over 10% of our workforce to engineers, making us a trading company with strong technical expertise. We provide excellent laser products and optical-related products from around the world, including the USA, UK, Germany, France, Switzerland, Denmark, and Lithuania. We have established agency agreements with top-class manufacturers in each country, and currently, we have about 50 overseas trading partners. Additionally, we can independently assemble laser-related equipment sourced from around the world and offer it as application systems. While we are a trading company, we also provide services akin to a fabless manufacturer. With gratitude for our customers' demands, we will continue to offer flexible and aggressive solutions.