Mass flow controller, Alicat Corporation

ジャパンコントロールス 「Japan Controls Co. Ltd.」 東京本社
Standard features include a 100ms control response, high flow accuracy of ±(0.8% RD + 0.2% FS), analog output, and RS-232C communication. ★ High-speed response is achieved through the laminar flow method (differential pressure type). ★ Quickly follows flow changes. High-speed control response allows you to achieve the desired flow in a short time. ★ Flow settings can be made not only through front switch operation but also via analog input and RS-232C communication. ★ Standard equipped with mass flow output of 0-5VDC. Options for 0-10VDC, 1-5VDC, and 4-20mADC are also available. Additionally, a second analog output can be added. ★ A wide lineup ranging from a small 0.5 SCCM type to a large 5000 SLPM type. ★ Capable of controlling 98 types of gases, including mixed gases, with a single unit. Gas selection can be easily performed using the front switch operation. For more details, please contact us or download the catalog.

