Optical component for ultra-precision laser measurement system - beam splitter
It is mainly used for measuring the length of the X and Y stages of exposure equipment.
The "Vermiller" is mainly used for measuring the length of the X and Y stages of exposure devices. The processing accuracy of the Vermiller has a significant impact on the performance of the X and Y stages. The materials used include high-purity synthetic quartz and low thermal expansion glass such as ClearCeram Z. 【Features】 ○ Material: ClearCeram, synthetic quartz ○ Length dimensions: 100 mm to over 800 mm ○ Surface accuracy: a few micrometers to λ/10 *For detailed specifications regarding materials, shapes, etc., please feel free to consult us.
basic information
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