Piezo Assist Stage
Manually controlled precision positioning stage
The piezo assist stage is a manual stage that features a minimum resolution of 20 nm and coarse movement (on the order of mm). Its main applications include precise positioning of tables and tasks requiring control of small loads (such as nanoindentation), which can be easily achieved with this manual precision stage. It is compact in size, making it easy to transport, and very simple to use. It is a reasonably priced product that can be introduced on a low budget. (*1 nm = one billionth of a meter)
basic information
Operating Principle of the Piezo Assist Stage ■ Device Configuration The piezo assist stage features a micrometer as its coarse motion mechanism and a piezo assist mechanism for fine motion in both the X and Y axes. The piezo assist mechanism incorporates our company's piezo actuator, which enables precise positioning through its expansion and contraction mechanism. The micrometer has a maximum travel range of 13mm and can achieve positioning with a resolution of 10μm. The piezo assist has a travel range of approximately 35μm and can achieve positioning with a resolution of 20nm. By combining these two adjustment mechanisms, the piezo assist stage enables precise positioning with a maximum travel range of 13mm and a resolution of 20nm.
Price range
P2
Delivery Time
OTHER
Model number/Brand name
MTPA series
Applications/Examples of results
- Autofocus - Confocal microscope - Semiconductor, FPD inspection equipment - Image processing equipment - Laser processing - Interferometer shape measurement
