Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera ALEX-i
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Ultra-high sensitivity CCD camera corresponding to VUV, EUV, soft X-ray, and hard X-ray regions.
This is a super high-sensitivity CCD camera suitable for VUV, EUV, soft X-ray, and hard X-ray regions. It achieves a high signal-to-noise ratio (S/N ratio) through high-sensitivity CCD and cooling technology. It is capable of detecting extremely weak signals that cannot be measured with CMOS cameras. ■ Super High Sensitivity The CCD sensor achieves a high quantum efficiency of up to 98%, allowing for the measurement of weak signals. It realizes a high dynamic range with 18-bit digital output, enabling simultaneous measurement of strong and weak signals. The TE cooling system, which cools down to -100°C, achieves an extremely low dark current of 0.00015 e-/pixel/s. ■ High Performance as a Camera It can read out at a maximum frame rate of 5 MHz. It is equipped with multiple interfaces, including GigE and USB 3.0. Software and SDK for the camera are provided. ■ Ideal for Use in Vacuum Equipment It is compatible with CF flanges DN63, DN100, and DN160, making it easy to install in vacuum equipment. The design and materials of the camera provide resistance to 80-degree baking, allowing for use in UHV (Ultra High Vacuum) conditions.
basic information
■Product Model The ALEX series from greateyes offers four lineups based on resolution: 1k1k 2k2k 2k2k plus 4k4k Additionally, for each lineup, you can choose from the following types of CCD sensors based on your application: - Front-illuminated CCD (FI) - Back-illuminated CCD (BI) - Fringe suppression consideration deep depression type CCD (BI DD) - Back-illuminated CCD [high sensitivity type] (BI UV1)
Price range
Delivery Time
Model number/Brand name
Greateyes「ALEX-i」
Applications/Examples of results
EUV lithography X-ray tomography Fourier transform holography X-ray fluoroscopy Coherent diffraction imaging X-ray tycho-graphy Grazing incidence small-angle X-ray scattering (GISAXS)
