Molybdenum Disilicide (MoSi2) Heaters “Up to 1800 degrees C usable!”

Molybdenum Disilicide Heaters: Repeatable, and long-life, customized design is possible

last updated May 15, 2026

Carbon Adhesive “high-strength, heat-resistant adhesive for carbon materials”

High-strength, heat-resistant adhesive for carbon materials. Adhesion is possible without impairing the excellent properties of carbon materials.

last updated May 15, 2026

Glass-like Carbon “Carbon material with excellent chemical and corrosion resistance”

Glass-like Carbon is a type of carbon material with a proven track record for use in semiconductor manufacturing system components. High purity is also possible.

last updated May 15, 2026

Masking Rubber Sheet (Masking Rubber Sheet for Plating)

Silicone rubber sheet is used as masking material for lead frames, plating purposes, and so on.

last updated May 15, 2026

Quartz Tube Cleaning System (HTC/VTC series) “Contributing to the reduction of chemical solution and pure water”

Vertical cleaning system (VTC series) saves space and contributes to the "reduction of chemical solution and pure water". World's top-class delivery record (over 400 units)

last updated May 15, 2026

Wafer Transport and Transfer System “Pitch Conversion” and “Face to Face Transfer”

Automatic transfer of wafers in a cassette to another cassette/Possible to add functions such as simultaneous transfer of 2 cassettes, pitch conversion, and face-to-face (back-to-back) transfer.

last updated May 15, 2026

IPA Vapor Drying System

IPA vapor displaces moisture and dries the object. For 4 to 8-inch wafers. Can be installed into and docked to various cleaning tools.

last updated May 15, 2026

Spin Type Cleaning System WULF series for high definition photomasks

Equipped with a spin cleaning unit that uses tap water. This method utilizes a cleaning solution that replaces the RCA cleaning solution.

last updated May 15, 2026

Glass Substrate Deposition System “Low Temperature Deposition” “Flexible Substrate Support”

4.5 generation glass substrate deposition system for rigid/flexible devices such as FPD.

last updated May 15, 2026

High-productivity Continuous Atmospheric Pressure CVD (APCVD) System (AMAX1200)

Mass production / NSG(SiO2)/PSG/BPSG deposition High-productivity / Continuous atmospheric pressure CVD (APCVD) system (for 12-inch wafers)

last updated May 15, 2026

High-productivity Continuous Atmospheric Pressure CVD (APCVD) System (AMAX800V)

Mass Production / NSG(SiO2)/PSG/BPSG deposition　 High-productivity/Continuous atmospheric pressure CVD (APCVD) system (for up to 8-inch wafers)

last updated May 15, 2026

Surface Modification Treatment Processing and Jig Cleaning (TOMCO)

Maintenance of jigs and parts is from quality maintenance and improvement. Our thermal spraying and cleaning technology reproduces high quality without damaging the base material.

last updated May 15, 2026

Precision Machined Parts (TOMCO) “reliable machining technology and quick delivery”

We support our customer's development of superior products with our proven processing technology and quick delivery.

last updated May 15, 2026

Silicone Rubber Moldings, ideal for semiconductor manufacturing systems, medical device parts, etc.

Silicone has excellent heat resistance, weather resistance, and electrical insulation properties and are used in various fields such as semiconductor manufacturing, medical care, food, and electronics.

last updated May 15, 2026

Ceramic Fiber “Resistant to a maximum operating temperature of 1800 degrees!”

We can produce blankets, boards, blocks, and other processed goods to meet your requirements.

last updated May 15, 2026

Removable Thermal Insulation Cover. “Energy-saving, safe, custom-made, easy to detach”

By selecting and using insulation materials that meet the required specifications, the surface temperature is reduced by approximately 60% (from 200-65 degrees C with t15 heat insulation material), resulting in energy saving.

last updated May 15, 2026

Brass Tube “excellent in extensibility, bendability, drawability, and plating”

Faucet spouts and drainpipes (we have delivery records for major manufacturers). Pipes can be expanded to the required size according to the customer's application.

last updated May 15, 2026

Copper Tube “metal with excellent heat conductivity” “good workability” “antibacterial properties”

Copper is a metal with excellent heat conductivity and good workability. Its bacteria resistant properties have also been confirmed. Tubes can be drawn or shaped to the required size according to the customer's application.

last updated May 15, 2026

Ultra-transparent Silicone Rubber Sheet (HT Sheet) “95% transmittance”

Silicone rubber sheet (HT sheet) with 95% transmittance is the best buffer protection film for preventing scratches on LCD screens and operating touch panels and other screens.

last updated May 15, 2026

Silicone Gel Sheet “for shock absorption and masking” and “quick delivery”

Ultra-low hardness silicone rubber sheet with vibration isolation performance, which is not possible with rubber, high shock absorption by its extraordinary softness, and excellent water and dust proofing properties.

last updated May 15, 2026

Silicone Rubber Sheet with Glass Cloth “Impact-Resistant”

Impact-resistant Silicone sheet made of silicone rubber with glass cloth placed between sheets.

last updated May 15, 2026

High-performance Single-wafer Processing Atmospheric Pressure CVD (APCVD) System (A200V)

Small quantities and wide varieties. NSG(SiO2)/PSG/BPSG deposition. Single-wafer processing atmospheric pressure CVD (APCVD) system (Compatible with 8-inch SiC wafers)

last updated May 15, 2026

Atmospheric Pressure CVD (APCVD) System for Small-scale Production and Development (D501)

For prototyping, development, and small lot production For deposition of NSG(SiO2)/BSG/PSG/BPSG Batch processing (simultaneous processing of multiple substrates) APCVD system

last updated May 15, 2026

DLC Coating, DLC System “Low temperature deposition” “Hard to peel off”

The plasma ion implantation method enables diamond-hard, low-friction, high-cohesion coatings on various shapes and sizes of metals, resins, and rubber materials.

last updated May 15, 2026

Continuous Atmospheric Pressure CVD System for solar cell mass production (AMAX1000S)

For mass production of crystalline Si solar cells/For NSG(SiO2)/PSG/BSG deposition High productivity/Continuous atmospheric pressure CVD (APCVD) system

last updated May 15, 2026

Heat-resistant Glass Fiber (Siliglas) “High-temperature heat resistance”

Capable of handling long hours of continuous use even at temperatures as high as 1000 degrees C. Heat-resistant glass fiber "Siliglas"

last updated May 15, 2026

Silicone rubber sheet for food molding

Silicone rubber sheets that protect food safety and quality, preventing foreign matter contamination.

last updated May 15, 2026

Silicone rubber sheet for automobiles

High-quality silicone rubber sheet ideal for automotive seals.

last updated May 15, 2026

Silicone rubber sheet for medical devices

For medical device packing. Prevents foreign matter contamination and ensures high safety.

last updated May 15, 2026

Aerospace-grade heat-resistant silicone rubber sheet

High-quality silicone rubber sheets that meet the heat resistance needs of the aerospace field.

last updated May 15, 2026