Flash Lamp Annealing Device FLA

Various materials such as semiconductors! Annealing is possible in ultra-short times ranging from a few milliseconds to several hundred milliseconds.

The Flash Lamp Annealing device, FLA, is a standalone unit designed for DTF-FLA ultra-short time annealing. It is capable of ultra-short annealing times ranging from a few milliseconds to several hundred milliseconds for semiconductor materials and other materials. The very short pulses (micro/millisecond level) from the xenon flash lamp heat only the surface at an ultra-fast heating rate, making it a compact research and development device suitable for applications such as annealing films on flexible substrates and substrates with low heat resistance. It is compact, user-friendly, and ideal for research and development in various applications. For more details, please contact us or refer to the catalog.

basic information

【Features】 ○ Standalone device designed for DTF-FLA ultra-short time annealing ○ Capable of ultra-short time annealing from a few milliseconds to several hundred milliseconds for semiconductor materials and other materials ○ Compact and user-friendly, ideal for research and development in various applications ○ Surface heating at ultra-fast heating rates using very short pulses (micro/millisecond level) from a xenon flash lamp ○ Used for annealing processes on flexible substrates and films on low-temperature resistant substrates ○ Improvement of film quality for heteroepitaxial layers in solar cells such as CIS and CIGS (flexible, glass substrates, etc.) ○ Modification of transparent conductive oxide films like ITO (flexible, glass substrates, etc.) ○ Enhancement of crystallinity in a-Si and Poly Si ○ Annealing treatment of semiconductor materials, ultra-thin metal films, and silicon nanoparticles using inkjet ○ Formation of nanocrystals such as Si, Ge, and Sn ○ Local melting-recrystallization / FLASiC (SiC on Si) ○ Activation of dopants (SiC/GaAs) for ultra-shallow junctions (Si) ● For more details, please contact us or refer to the catalog.