Plasma cleaner
We will clean the vacuum chamber and the sample without damaging the sample and without contamination.
basic information
■Ignition of plasma at a low pressure of 0.1 mTorr. ■Plasma emission can be monitored. ■Automatic matching of RF impedance. ■Automatic control of gas flow rate is possible.
Price range
Delivery Time
Model number/Brand name
PIE Scientific LLC (USA)
Applications/Examples of results
Electron microscope SEM, FIB, TEM, EBL, CD-SEM, EBR, EUVL, ALD, and high-pressure chamber.
