High-frequency measuring instrument
RF measurement device / Capable of high-precision measurement of RF inside the chamber
basic information
The Octiv Suite can measure the following RF parameters: - Voltage - Current - Phase - Harmonics - Impedance - Ion flux - Waveform reconstruction
Price range
Delivery Time
Model number/Brand name
Impedans Corporation
Applications/Examples of results
Measurement of RF parameters for etching, sputtering, ion plating, etc. Confirmation of the performance of the RF power supply.
