Vacuum ozone removal device
It is a high-efficiency ozone removal device that can be used under vacuum conditions.
This is a high-efficiency ozone decomposer manufactured by PARAM, designed for use under vacuum conditions. By developing materials with several times higher decomposition efficiency compared to conventional products, it boasts a very high processing capacity and is an ozone decomposer that generates no dust.
basic information
【Features】 ○ Can be used under vacuum. ○ Decomposes ozone without generating dust. ○ Prevents corrosion of the vacuum pump by installing it before the vacuum pump. 【Specifications】 Model: OZ-1000 Inlet ozone concentration: 15% or less Outlet ozone concentration: 0.1 ppm or less Maximum processing flow rate: 5 sccm or less Conductance: 100 L/min or more * For details, please contact us. * If you have any other specifications you would like, please contact us.
Price range
Delivery Time
Applications/Examples of results
Electronic components, semiconductors, vacuum equipment, research and development.
