Piezoelectric film forming device
It is a film deposition device specialized for the production of MEMS and FBAR.
The US company AMS's sputtering equipment (piezoelectric films, dielectric films, metal sputtering equipment) achieves high in-plane uniformity primarily for Al films and Mo films, as well as many other films.
basic information
Principle: DC, AC (Dual Magnetron) Sputtering Features Film deposition of AlN, AlScN (piezoelectric) films, Mo (metal) films Excellent stress control/distribution Crystallinity High throughput High yield High maintainability Compatible with 200 mm wafers Very compact design From R&D to mass production equipment World's leading market share in FBAR applications Applications For FBAR, MEMS, and sensors Delivery record Domestic: multiple units Overseas: numerous units delivered
Price range
Delivery Time
Applications/Examples of results
For filters such as MEMS and FBAR Domestic: Multiple units Overseas: Numerous units delivered
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Distributors
Matsubo provides services in two business areas: [Industrial Machinery & Information] and [Powder Technology], supported by a [Technical Center] backup system. Breaking away from the confines of a specialized machinery trading company, we have established a comprehensive service system to ensure our customers can use our products with confidence, ranging from consulting prior to implementation, engineering related to installation and localization, to maintenance and proposals for improvements and modifications after installation.