Film thickness adjustment trimming device
We achieve excellent film thickness uniformity using a self-developed ion source.
Principle: DC-based Ion Milling Features: Simple and robust structure Quick response time (depending on the amount of cutting) Zero etching capability Simple maintenance with DC-based source (gridless, filamentless) Applications: Thickness adjustment of temperature compensation layers (SiO2) for SAW filters, thickness adjustment of LTO, AlN films, etc. Thickness and frequency adjustment of piezoelectric films such as AlN and LTO Thickness adjustment of other conductive and non-conductive films Delivery Record: Japan: Multiple units Overseas: Numerous units delivered
basic information
It is a trimming device used in SAW, BAW filters, and other applications by the American company AMS.
Price range
Delivery Time
Applications/Examples of results
MEMS, SAW filter, FBAR
