Arc detector
We detect arcs with a resolution of 1 microsecond, contributing to improved yield. It is also optimal as a pulse monitor.
- Monitor the fluctuations of current and voltage with a high resolution of 1 microsecond and detect anomalies. - Can be easily installed between the RF power supply and the matching box. - Communication is possible via Ethernet Net (CAT) and other means.
basic information
It is optimal for arc detection and pulse monitoring in mass production environments such as etching equipment, CVD, and sputtering.
Price range
Delivery Time
Applications/Examples of results
We have a proven track record as pulse monitors and arc detectors for etching equipment, CVD, sputtering, etc., in the mass production environment of semiconductor foundries.
