RF Spectrometer
We will detect various abnormalities within the chamber without disrupting the RF inline, contributing to yield improvement.
By simply attaching the antenna to the plasma processing device window, abnormalities within the device can be detected.
basic information
- It can detect the end of gas cleaning in the device. - It can also detect wafer handling errors, gas leaks, pressure changes, and power changes.
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Applications/Examples of results
Semiconductor foundries Semiconductor manufacturing equipment manufacturers Semiconductor manufacturing equipment users RF power supply manufacturers Matching box manufacturers Universities and research institutions
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Matsubo provides services in two business areas: [Industrial Machinery & Information] and [Powder Technology], supported by a [Technical Center] backup system. Breaking away from the confines of a specialized machinery trading company, we have established a comprehensive service system to ensure our customers can use our products with confidence, ranging from consulting prior to implementation, engineering related to installation and localization, to maintenance and proposals for improvements and modifications after installation.