RF Spectrometer
We will detect various abnormalities within the chamber without disrupting the RF inline, contributing to yield improvement.
basic information
- It can detect the end of gas cleaning in the device. - It can also detect wafer handling errors, gas leaks, pressure changes, and power changes.
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Applications/Examples of results
Semiconductor foundries Semiconductor manufacturing equipment manufacturers Semiconductor manufacturing equipment users RF power supply manufacturers Matching box manufacturers Universities and research institutions
