PlasmaMAX Hollow Cathode Plasma CVD
It is designed to optimize the mass production process by maximizing the substrate width and film deposition speed while maintaining the highest quality.
This technology allows for the optimization of the manufacturing of barrier films, optical multilayer film products, functional fibers, displays, and a series of related custom applications. The PlasmaMAX hollow cathode can be customized in shape, making it easy to integrate into horizontal inline vacuum deposition systems, vertical inline vacuum deposition systems, and roll-to-roll web coating processes. With an easily customizable design platform and stable processes across a wide range of pressure levels, it can be used with most existing CVD and PVD equipment, enabling performance optimization at a low cost.
basic information
- The dynamic deposition rate (DDR) is up to 10 times that of conventional PDV processes. - Manufacturing of high-quality thin films with mechanical resistance. - Demonstrated the ability to extend PECVD coating to a substrate width of up to 4 meters, one of the largest in the industry. - Advanced uniformity control for a wide range of PECVD deposition applications. - An environmentally sustainable dry process as an alternative to traditional resource-consuming wet processes. - Very low total cost of ownership due to inexpensive consumables (about one-tenth of PVD) and minimal maintenance requirements. - Easy operation of precursors, mixtures, gas supply ratios, and plasma output to accurately control film properties such as refractive index, optical transparency, film stress, adhesion, flexibility, hardness, and density. - Capable of depositing on substrates of various shapes and materials. - It is also possible to add magnets to optimize plasma shape. - Post-treatment processing by plasma (without precursors) to improve adhesion.
Price information
Please contact us.
Delivery Time
Model number/Brand name
AGC Plasma Technology Solution
Applications/Examples of results
Barrier film products, optical multilayer film products, functional fibers, for display manufacturing. PlasmaMAX hollow cathode can be customized in shape, making it easy to integrate into horizontal inline vacuum deposition systems, vertical inline vacuum deposition systems, and roll-to-roll web coating processes. With an easily customizable design platform and stable processes across a wide pressure range, it can be used with most existing CVD and PVD equipment, allowing for performance optimization at low cost.
