Process analysis equipment

The process liquid automatic concentration measurement device (PAT-2100 type) can quickly and accurately measure TMAH, AL etchant liquid, Cu etchant liquid, BHF, H2O2, and other substances used in semiconductor and LCD manufacturing processes, contributing to the improvement of quality and yield in manufacturing processes. Additionally, the dew point meters (XDT, LPDT, XPDM series) can measure trace moisture in various gases used in petroleum refining, chemical plants, and clean rooms.