Technical Data: Analytical Methods Essential for Semiconductor Manufacturing and Quality Control
Analytical methods essential for the processes and quality control in semiconductor manufacturing.
A list of comprehensive measurement examples using process analyzers.
basic information
This is a summary of the analyzable parameters using the Metronome analysis equipment. For more detailed information, please refer to the linked Metronome application documentation (link) or contact Metronome Japan.
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Applications/Examples of results
● Titration: Quantification of pure acids and bases, as well as the individual acid concentrations in etching solutions. ● Ion Chromatography: Quantification of ionic impurities in acids, organic solvents, and high-purity water. ● CVS and Voltammetry: Analysis of organic additives (i.e., suppressors, brighteners, and smoothers) in copper plating baths. ● Near-Infrared Spectroscopy: Evaluation of the quality of etching solutions. ● Raman Spectroscopy: Non-destructive real-time monitoring of cleaning and etching solutions. ● Process Analysis: Online monitoring of various parameters such as water purity, acid content in etching solutions, and metal content in plating baths.
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Metrom AG, based in Herisau, Switzerland, is a leading company specializing in ion analysis with over 70 years of history. It provides products and services in more than 140 countries worldwide. Based on Swiss technology developed over many years, the equipment comes with a 3-year warranty.