一般財団法人材料科学技術振興財団　MST Official site

[Analysis Case] UV Sensor High-Precision Evaluation of Impurity Concentration in AlGaN Released

一般財団法人材料科学技術振興財団　MST

In SIMS analysis, it is essential to use standard samples that closely match the composition of the measurement sample in order to obtain more reliable concentration quantification values. By offering a wide range of AlGaN standard samples with varying Al content, we have been able to more accurately determine the impurity concentration in AlGaN, which is used in UV LEDs and UV sensors. We will present a case study where SIMS analysis of a UV sensor was conducted to quantify the concentration of the dopant, Si. ★★★★★★★★★★★★★★★★★ 　Please see the link for the analysis data ★★★★★★★★★★★★★★★★★