一般財団法人材料科学技術振興財団　MST Official site

[Analysis Case] Evaluation of Dopant Concentration Distribution in Thin Film Amorphous Si Solar Cells has been published.

一般財団法人材料科学技術振興財団　MST

We will introduce a case where the concentration distribution of dopants in a-Si (amorphous silicon) was quantitatively evaluated in flexible thin-film Si solar cells. The sample, sealed with resin, was disassembled, and SIMS analysis was conducted. In the analysis of B (Figure 3), measurements were taken with enhanced depth resolution since it exists in shallow areas on the surface side. In the analysis of P (Figure 4), a large amount of H exists in a-Si, causing mass interference, so measurements were conducted under conditions that separated H from Si using high mass resolution methods to detect only P. ★★★★★★★★★★★★★★★★★ Please refer to the linked data for analysis results. ★★★★★★★★★★★★★★★★★