Technical Information "Gas Analysis of SiN Film by TDS (C0403)" Released
一般財団法人材料科学技術振興財団 MST
The analysis case "Gas Analysis of SiN Film by TDS (C0403)" has been published on the MST website. For more details, please visit the MST website. http://www.mst.or.jp/
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This shows the TDS analysis results for SiN films on Si substrates.
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