Technical Information "Evaluation of Impurity Concentration in Gallium Oxide Ga2O3 Films (C0416)" and two other items published.
一般財団法人材料科学技術振興財団 MST
We have published the following four analysis cases on the MST website: - Evaluation of impurity concentration in gallium oxide Ga2O3 films (C0416) - High-precision quantitative evaluation of impurities in SiGe (B0226) For more details, please visit the MST website. http://www.mst.or.jp/
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Quantitative evaluation of impurity elements is possible.
SIMS: Secondary Ion Mass Spectrometry
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