Published technical information "Low-temperature photoluminescence spectrum of Si subjected to ion implantation and annealing (C0434)."
一般財団法人材料科学技術振興財団 MST
We have published one analysis case on the MST website. - Low-temperature photoluminescence spectrum of Si subjected to ion implantation and annealing (C0434) For more details, please visit the MST website. http://www.mst.or.jp/
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It is possible to confirm the recovery of crystallinity due to irradiation defects and annealing.
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