Super Bubbler WAC
Advanced electrical resistivity control technology suppresses static electricity in ultra-pure water!!
【Features】 - Optimizes the electrical resistivity of cleaning water in semiconductor manufacturing, FPD manufacturing, and dicing processes. - Prevents electrostatic breakdown and re-adhesion of fine particles, improving yield. - All models come with built-in electrical resistivity sensors, making installation and piping easy. - Maximum flow rate: 3,000L/h, pressure loss: 0.06MPa at 3,000L/h. - By pressing the operation switch and inputting the electrical resistivity, control begins instantly at the set value of ±0.03MΩ·cm. - With a maximum operating pressure of 0.5MPa, the arrangement of models can be flexible. - Quickly converges to the set value even with large fluctuations in water usage. - Expensive consumables like CO2 dissolution membranes are unnecessary. Unlike membrane systems, there is no CO2 gas exhaust or wastewater. - Sterilization with hydrogen peroxide (3%) is possible, ensuring no bacterial growth and peace of mind.
basic information
【Specifications】 - Processing capacity: 200–1,000L/h, 200–2,000L/h, 300–3,000L/h - Electrical resistivity control range: 0.16–1.7MΩ·cm, 0.11–1.5MΩ·m, 0.13–1.9MΩ·m - Control accuracy: Set resistivity ±0.03MΩ·m - Maximum inlet water pressure: 0.5MPa - Maximum CO2 pressure: 0.7MPa - Pressure loss: 0.06MPa at 3,000L/h - Pure water connection diameter: 3/4” female thread - Power supply: AC100-130V, AC220-240V, 50/60Hz, single phase 50VA - Options: Automatic CO2 cylinder switching device, signal indicator light, alarm output, etc.
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