Antistatic solid film lubricant for semiconductor manufacturing
Static electricity countermeasures are necessary in semiconductor manufacturing processes. Antistatic solid film lubricants.
In the semiconductor manufacturing industry, it is essential to suppress the generation of static electricity to ensure the stable operation of precision equipment and maintain product quality. Particularly in transport and moving parts, measures against static electricity are crucial as they can cause the adhesion of fine dust and malfunction of components. The occurrence of static electricity can lead to reduced yield on the manufacturing line and issues related to product reliability. Additionally, in the semiconductor manufacturing process, while it is desirable to lubricate machines, it can be challenging to use lubricants such as grease or oil due to the need to maintain a clean environment. The anti-static solid film lubricant "Gritpan JF 163" addresses these challenges by providing anti-static effects with a surface resistivity of approximately 10^6Ω, suppressing the generation of static electricity while forming a self-lubricating film on metal friction surfaces, thereby simultaneously improving low friction and wear resistance. The anti-static solid film lubricant "Gritpan JF 163" contributes to achieving both lubrication and static electricity prevention while maintaining a clean environment. 【Usage Scenarios】 - Transport parts within the semiconductor manufacturing process - Moving parts of precision equipment and electrical devices - Areas where prevention of static electricity generation is desired
basic information
【Features】 - Suppresses the generation of static electricity due to anti-static effects (surface resistivity of approximately 10^6Ω) - Usable in environments where oil and grease cannot be used - Responds to temperature changes from low to high temperatures, maintaining stable lubrication performance - Forms a self-lubricating film on the friction surfaces of metal and resin parts - Improves low friction and wear resistance while maintaining the mechanical properties of the base material 【Our Strengths】 NOK Klüber Co., Ltd. was established as a joint venture between NOK Corporation and Germany's Klüber Lubrication, providing special lubricants, fluorinated lubricants, coatings, and spray products based on the long-standing technologies of both companies. We support our customers with product development capabilities and technical support that meet the needs of diverse markets such as automotive, industrial machinery, home appliances, office equipment, and the semiconductor industry.
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Model number/Brand name
GLEITPAN JF 163
Applications/Examples of results
● Moving parts of precision machinery and electrical equipment ● Transport section within the semiconductor manufacturing process
Detailed information
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GLEITPAN is a coating product that disperses solid lubricants such as fluororesin within a thermosetting resin with excellent heat resistance and mechanical properties. By forming a self-lubricating film on the friction surfaces of metal and resin parts, it can improve low friction and wear resistance while maintaining the mechanical properties of the substrate.
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The general processing steps for GLEITPAN begin with pretreatment of the base material. After that, cleaning is performed to ensure that no cleaning solvent remains on the surface. Then, it is painted using any desired painting method, and the solvent is evaporated to a touchable level. This process is repeated with any desired painting method, and again, the solvent is evaporated to a touchable level. At this stage, a film has been formed, so it is necessary to check for any issues with film thickness or appearance, and finally, it is fired to cure the film.
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NOK Klüber Co., Ltd. was established as a joint venture between NOK Corporation and the German specialty lubricant manufacturer Klüber. Based on the unique technologies cultivated by both companies over many years, we provide products, technologies, and services tailored to the needs of various markets, including automotive, industrial machinery, home appliances, office equipment, and the semiconductor industry.