Fluororesin bellows pump for slurry liquid
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No worries about metal contamination! No metal parts are used at all except for the parts in contact with the liquid.
CMP-compatible slurry (oxidation film slurry, metal slurry)
basic information
【Features】 ◆ The uniquely designed round bellows reduce slurry shear. ◆ There is no concern for metal contamination as no metal parts are used except for the wetted parts. ◆ O-rings are not used in the wetted parts. ◆ Fully self-priming, it can operate immediately with only the connection of clean dry air or nitrogen. ◆ No control unit is required for pump control. ◆ Stroke detection function and leak sensor compatible mechanism can be selected as options. ◆ Compact and lightweight, making it very easy to handle. ◆ Three models with discharge flow rates of 15L/min, 30L/min, and 60L/min.
Price range
Delivery Time
Model number/Brand name
ASTIPURE2 A2SY
Applications/Examples of results
[Applications] - Transfer of high-purity chemicals used in semiconductor processes. - Flow control in circulation, filtration, and chemical supply systems. - Safe transfer of chemicals in clean rooms. - Chemical handling in harsh environments such as corrosive gases. - Injection and sampling of chemical solutions. - Precise dosing of pharmaceuticals. - Variable control of transfer liquid volume.
Line up（1）
| Model number | overview |
|---|---|
| A2SY | A2SY1 F8, A2SY2 F12, A2SY3 F16 |
