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ED SCOPE

A new sensation scope that vividly highlights and visualizes invisible, hard-to-see nanoscale defects.

- It is possible for anyone to easily conduct quantitative inspections and evaluations of defects inside and outside the wafer that are difficult to detect visually in a short amount of time. - The collaboration of special optical technology and special image processing technology makes defects stand out clearly and visualizes them. - Depth (Z direction) can be observed at the nano level, while the field of view (XY direction) can be observed at the macro level. - Detection of scratches, cracks, dimples, watermarks, slips, saw marks, voids, foreign substances, etc.

basic information

◇ Principle: Optical, Non-contact ◇ Observation time per screen: Approximately 10 seconds ◇ Product purpose: Defect visualization ◇ Display: Image display ◇ Operation: Simple ◇ Observation: Transmitted samples (internal, surface, back), reflected samples (surface) ◇ Field of view range: 34×28mm to 136×115mm ◇ Depth of field: Transmitted samples (approximately 300mm) ◇ Reflected samples: (approximately 1mm) ◇ Resolution: (X・Y) 150 nm and above ◇ Resolution: (Z) 5 nm and above ◇ Inspection items: Surface inspection, internal inspection ◇ Introduction: On-site inspection, quality, development, in combination with measuring instruments ◇ Environment: Normal ◇ Maintenance: Free ◇ Consumables: None

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ED SCOPE

Applications/Examples of results

◇ Incoming inspection of Si, SiC, GaN, GaAs wafers, etc. ◇ Inspection during the manufacturing process of semiconductor devices. ◇ Development of Si, SiC, GaN, GaAs wafers, etc.

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Our group is engaged in the manufacturing and sales of automotive-related products (piston rings, valve seats, and other automotive-related products) as well as marine and other products, along with related businesses. Our products are adopted in various types of engines, backed by reliable technology and a rich lineup of quality. In addition to automotive and marine products, we also handle MIM (Metal Injection Molding) parts that can achieve small and complex shapes, axial gap motors optimal for AGVs, motor cores (powdered magnetic cores), highly biocompatible titanium alloys (NiFreeT), and medical device components (dental implants).