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ED SCOPE
A new sensation scope that vividly highlights and visualizes invisible, hard-to-see nanoscale defects.
- It is possible for anyone to easily conduct quantitative inspections and evaluations of defects inside and outside the wafer that are difficult to detect visually in a short amount of time. - The collaboration of special optical technology and special image processing technology makes defects stand out clearly and visualizes them. - Depth (Z direction) can be observed at the nano level, while the field of view (XY direction) can be observed at the macro level. - Detection of scratches, cracks, dimples, watermarks, slips, saw marks, voids, foreign substances, etc.
basic information
◇ Principle: Optical, Non-contact ◇ Observation time per screen: Approximately 10 seconds ◇ Product purpose: Defect visualization ◇ Display: Image display ◇ Operation: Simple ◇ Observation: Transmitted samples (internal, surface, back), reflected samples (surface) ◇ Field of view range: 34×28mm to 136×115mm ◇ Depth of field: Transmitted samples (approximately 300mm) ◇ Reflected samples: (approximately 1mm) ◇ Resolution: (X・Y) 150 nm and above ◇ Resolution: (Z) 5 nm and above ◇ Inspection items: Surface inspection, internal inspection ◇ Introduction: On-site inspection, quality, development, in combination with measuring instruments ◇ Environment: Normal ◇ Maintenance: Free ◇ Consumables: None
Price range
Delivery Time
Model number/Brand name
ED SCOPE
Applications/Examples of results
◇ Incoming inspection of Si, SiC, GaN, GaAs wafers, etc. ◇ Inspection during the manufacturing process of semiconductor devices. ◇ Development of Si, SiC, GaN, GaAs wafers, etc.
