![Metal Injection Molding Parts [MIM]](https://image.mono.ipros.com/public/premium/image_category/431/1474640/IPROS349882292332912939.jpg?w=140&h=140){kind=small}
ED SCOPE Tile
A new sensory scope that vividly highlights and visualizes invisible, hard-to-see nanoscale defects.
- It is possible for anyone to easily and quantitatively inspect and evaluate defects inside and outside the wafer in a short time, even when visual inspection is difficult. - The collaboration of special optical technology and special image processing technology vividly highlights and visualizes defects. - Observation is possible at the nano level in depth (Z direction) and at the macro level in the field of view (XY direction). - Detection of scratches, cracks, dimples, watermarks, slips, saw marks, voids, foreign substances, etc. - Compatible with wafers ranging from Φ100mm to Φ300mm due to the automatic tiling stage.
basic information
◇ Principle: Optical, Non-contact ◇ Observation time per screen: Approximately 10 seconds ◇ Product purpose: Defect visualization ◇ Display: Image display ◇ Operation: Simple ◇ Observation: Transmitted samples (internal, surface, back), reflected samples (surface) ◇ Field of view range: 34×28mm to 100×84mm ◇ Depth of field: Transmitted samples (approximately 300mm) ◇ Reflected samples: (approximately 1mm) ◇ Resolution: (X・Y) 150 nm and above ◇ Resolution: (Z) 5 nm and above ◇ Inspection items: Surface inspection, internal inspection ◇ Introduction: On-site inspection, quality, development, in combination with measuring instruments ◇ Environment: Normal ◇ Maintenance: Free ◇ Consumables: None
Price range
Delivery Time
Model number/Brand name
ED SCOPE Tile
Applications/Examples of results
◇ Incoming inspection of wafers such as Si, SiC, GaN, and GaAs. ◇ Inspection during the manufacturing process of semiconductor devices. ◇ Development of wafers such as Si, SiC, GaN, and GaAs.
