Positive resist materials for wiring formation applications 'UPP Series'
This is a positive resist material that can be used in the dry etching process.
The "UPP Series" is a positive resist material for wiring formation applications, possessing the following characteristics and suitable for use in dry etching processes. ■ High sensitivity: ≧ 40 mJ/cm² ■ Good patterning performance: ≧ 4 μm ■ Good dry etching resistance *Please feel free to contact us if you have any inquiries.*
basic information
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Position-type resist materials for wiring formation applications "UPP Series"
Applications/Examples of results
This is a positive resist material suitable for wiring formation applications that can be used in the dry etching process.
