Compound Molecular Pump TG1810/1813
Oil-lubricated spherical bearing type turbo molecular pump
**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.
basic information
【Product Features】 - Standard type for clean processes and a chemical type resistant to corrosive gas exhaust - Structure resistant to unexpected atmospheric intrusion - Strong against external impacts - Capable of serial communication - Safety standard certifications obtained: NRTL / SEMI-S2 / CE For additional functions and features, please refer to the catalog or contact us.
Price information
Please feel free to contact us.
Delivery Time
Model number/Brand name
TG1810/1813
Applications/Examples of results
Semiconductor manufacturing Electron gun evacuation, ion source evacuation FPD manufacturing Surface treatment, surface modification Manufacturing of various electronic components Tube manufacturing, optical component manufacturing Accelerators, radiation facilities, nuclear fusion research Heat treatment Research and development For further details, please contact us.
