Ultra-low vibration magnetic bearing type molecular pump TG-ML series
A low-vibration pump that suppresses the vibration value to below 1nm. By installing an anti-vibration damper, it can be further reduced by one order of magnitude (0.1nm)!
basic information
【Product Features】 ■ Successfully reduced the vibration value of the pump body to below 1nm! *According to our measurement method ■ Equipped with a dedicated anti-vibration damper to further reduce the vibration value by one order of magnitude! ● For other functions and features, please refer to the catalog or contact us.
Price information
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Delivery Time
Applications/Examples of results
■ Next-generation semiconductor manufacturing equipment, including EUV lithography systems ■ High-precision and high-performance electron microscopes, analytical instruments, and measurement devices
