Controller and power supply integrated magnetic bearing turbo molecular pump
Unnecessary wiring is eliminated, improving work efficiency and maintainability!
Osaka Vacuum was the first in Japan to successfully develop a turbo molecular pump. The magnetic bearing turbo molecular pump features a design that integrates the power unit and the pump, eliminating the need for output cables and separate controllers, thus removing the necessity for cable ducts and controller racks. This eliminates the cumbersome task of cable routing, improving work efficiency and maintainability. Its compact design also contributes to cost reduction. It is widely adopted in manufacturing industries such as medical devices, semiconductors, and analytical/testing equipment. 【Features】 ■ Cost reduction possible with flexible design! ■ Various access points consolidated at the front to improve work efficiency! ■ Standard IP54 (dustproof and splash-proof) compliant, usable even in harsh environments! *For more details, please contact us or download the catalog to view.
basic information
**Features** - Well-balanced exhaust performance, adaptable to a wide range of processes - Capable of high flow exhaust in a wide vacuum range - Excellent ultimate pressure and high compression ratio - Can shorten exhaust time by simultaneous startup with auxiliary pump - Rotor speed can be set arbitrarily (110 to 450 rps) - Exhaust capacity can be adjusted according to the process, eliminating the need for a pressure control valve - Compact design integrating controller and power unit - No output cables or separate controllers → Eliminates the need for cable ducts or controller racks - No complicated cable routing work, making installation easy - Frees up equipment design, contributing to cost reduction - Space-saving and improved accessibility → Various access points (switches, LEDs, cable/piping connections, etc.) are consolidated at the front, improving work efficiency - Reduces surrounding space on the sides and rear, contributing to compact equipment design - Easy access during maintenance - Standard IP54 (dustproof and splashproof) compliant, usable in harsh environments ● For more details, please contact us or refer to the catalog.
Price information
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Delivery Time
Applications/Examples of results
【Applications】 ○ Solar cell manufacturing equipment ○ Glass/lens processing ○ Film processing ○ LCD manufacturing equipment ○ Semiconductor manufacturing equipment ○ Accelerator/space environment testing equipment ● For more details, please contact us or refer to the catalog.
