Grease-lubricated bearing type turbo molecular pump TG60F
The installation position is flexible! A compact-sized combined molecular pump with an integrated controller!
The TG60F turbo molecular pump with grease-lubricated bearing is a compact size with an integrated controller. Its installation orientation is flexible, allowing for greater freedom in equipment design. It is ideal for applications such as electron gun evacuation, analytical instruments, and research and development. 【Features】 ■ Rapid vent stop capability. ■ Strong structure against atmospheric intrusion. ■ Compliance with safety standards: NRTL/SEMI-S2/CE (only for TG60F-20) *For more details, please contact us or download the catalog to view.
basic information
【Features】 ■Flexible installation position ■Compact size ■Energy-saving ■Rapid startup ■Rapid vent stop capability ■Strong structure against atmospheric entry ■High compression ratio ■Integrated controller ■Safety standard compliance: NRTL/SEMI-S2/CE (only for TG60F-20) 【Standard Set】 Pump + Connector for Controller
Price information
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Delivery Time
Applications/Examples of results
Semiconductor manufacturing, FPD (LCD, PDP, organic EL, FED, etc.) manufacturing, various electronic component manufacturing, tube manufacturing, optical component (lenses, optical filters, etc.) manufacturing, electron gun evacuation, ion source evacuation, heat treatment, surface treatment, surface modification, analysis and testing equipment, accelerators, synchrotron radiation facilities, nuclear fusion research, research and development, and others.
