New Magnetic Bearing Turbo Molecular Pump "TG397M～1307M"
Settings parameters and operational data can be stored in the pump body!
The 'TG397M / TG427M / TG907M / TG1307M' handled by Osaka Vacuum Equipment Manufacturing Co., Ltd. has achieved low power consumption through improvements in the magnetic levitation motor compared to conventional magnetic bearing turbo molecular pumps. Additionally, it is equipped with a memory function that stores operational data, touchdown counts, and other information in the pump body, allowing for data transfer even when the controller is replaced during overhauls. 【Features】 ■ Energy-saving design ■ Ability to retain operational data, touchdown counts, model information, etc., in the main unit *For more details, please refer to the catalog or feel free to contact us.
basic information
【Other Features】 ■Various communication specifications: Parallel I/O, RS232C, RS485, Profibus, DeviceNet, EtherCAT ■Compliance with international standards: NRTL/SEMI-S2/CE *For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Applications】 - Semiconductor manufacturing equipment - FPD manufacturing equipment - Solar cell manufacturing equipment - Processing of optical components such as glass/lenses - Film processing - Accelerator/space environment testing equipment *For more details, please refer to the catalog or feel free to contact us.
