Vacuum pumps for semiconductors *Exhibited at SEMICON Japan 2019
Introducing pumps necessary for electronic components and semiconductor manufacturing, such as turbo molecular pumps and dry vacuum pumps!
To realize an IoT society, various electronic components and semiconductors are necessary, and an appropriate vacuum environment is essential for their production. Our company is considering how to make vacuum pumps capable of supporting IoT to create that vacuum environment. This time, we will introduce products from our extensive lineup, focusing on vacuum pumps for semiconductors. 【Products】 ■ Controller and power supply integrated / Magnetic bearing turbo molecular pump (reactive product compatible specification): TGkine4200MI ■ Magnetic bearing turbo molecular pump, controller: TGkine3400M-R, TC0331M [New Product] ■ Magnetic bearing compound molecular pump (ultra-low vibration specification): TG420ML ■ Compact dry vacuum pump: DSP251 [New Product], DSP50 ■ Energy-saving dry vacuum pump: ER100D For more details, please download the PDF or contact us. Additionally, Osaka Vacuum will exhibit the above pumps at SEMICON Japan 2019, so please come and visit us.
basic information
【SEMICON Japan 2019 Exhibition Information】 Date: December 11, 2019 - December 13, 2019 Venue: Tokyo Big Sight Booth No.: 8219 (Front-end Zone; South Hall 2)
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Applications/Examples of results
For more details, please download the PDF or contact us.
