【Case Study】High Vacuum Exhaust System for X-ray Measurement Experiment Vacuum Chamber
Dry vacuum pumps achieve oil-free and clean exhaust without using oil in the exhaust flow path!
We would like to introduce a case where a "high vacuum exhaust system for X-ray measurement experiment vacuum containers" was delivered to the Kansai Quantum Science Research Institute (Kizugawa). This exhaust unit consists of a 300 L/s class magnetic bearing turbo molecular pump TG390M, which can be directly attached to the vacuum container, a combined vacuum gauge featuring a Pirani type and a cold cathode ionization vacuum gauge, along with a cart that holds the controllers and auxiliary pumps. The turbo molecular pump attached to the vacuum container is of the magnetic bearing type, allowing for maintenance-free, oil-free operation with extremely low vibration exhaust. Additionally, the inlet flange uses a Conflat type with a copper gasket, which reduces the permeation of light gases from the gasket and the release of exhaust gases, while also enabling high-temperature baking. 【Case Overview】 ■ Delivery Destination: National Research and Development Agency, Quantum Science and Technology Research Development Organization, Kansai Quantum Science Research Institute (Kizugawa) ■ Delivered Product: High vacuum exhaust system for X-ray measurement experiment vacuum containers *For more details, please refer to the PDF document or feel free to contact us.
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