SEMI F47/F42: Voltage Sag Immunity
Full support for consulting and introducing countermeasures and parts until the tests are compliant.
At QSES, we are quickly responding to the increasingly essential requirement of the "F47/F42 (Voltage Sag Immunity) Test" when delivering equipment to major semiconductor manufacturers, and we are providing testing and evaluation services. "SEMI F47" is a standard established within the SEMI standards regarding EMC, specifically defining the immunity tests for voltage dips and short-term power outages. Even in regions without EMC regulations, the submission of a "SEMI F47" compliance report may be required based on end-user demands. 【Features】 ■ SEMI F42: Testing method for susceptibility to voltage sags in semiconductor process equipment ■ SEMI F47: Specifications for voltage sag immunity in semiconductor process equipment ■ Support for equipment with large power capacity ■ Full support from countermeasures to report creation *For more details, please refer to the PDF document or feel free to contact us.
basic information
What is the SEMI F47/F42 (Voltage sag immunity) test? SEMI F47/F42 is one of the standards for semiconductor process equipment, simulating a state where the AC power supply experiences sudden voltage drops (from half a cycle to several seconds) due to equipment failures or significant load fluctuations within a semiconductor factory, and evaluating the resistance of the tested equipment under such conditions. It applies to all process equipment, including etchers, CVD, CMP, cleaning machines, exhaust gas treatment equipment, steppers, ion implantation machines, and automatic inspection equipment. *For more details, please refer to the PDF document or feel free to contact us.*
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For more details, please refer to the PDF document or feel free to contact us.
