SEMI S6: Safety Guidelines for Ventilation
Conducting tracer gas tests, CIH, and non-flammability tests related to SEMI S6!
"SEMI S6" is a guideline for environmental, health, and safety concerning exhaust ventilation. While "SEMI S2" includes regulations on chemicals, exhaust ventilation, and the environment, equipment that uses flammable or toxic gases and liquids in the process may require evaluation under "SEMI S6." In cases where toxic gases may be generated, simulations are conducted to confirm that there is no human exposure due to exhaust ventilation during normal operation, maintenance, and single failure scenarios. In cases where flammable gases may be generated, simulations are conducted to ensure that gases do not accumulate around electrical components. At QSES, we conduct tracer gas tests, CIH, and non-flammability tests related to S6. [Features] ■ Guidelines for environmental, health, and safety concerning exhaust ventilation ■ Equipment that uses flammable or toxic gases and liquids in the process may require evaluation under SEMI S6 *For more details, please refer to the PDF materials or feel free to contact us.
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