SEMI S2: Guidelines for Environment, Health, and Safety
Introducing some guidelines related to environment, health, and safety, such as safety interlocks.
The "SEMI S2" outlines the minimum considerations that must be taken into account regarding the working environment, hygiene, and safety for equipment used in semiconductor manufacturing. The requirements cover areas such as chemicals, radiation, electricity, physics, mechanics, environment, fire, earthquakes, exhaust, ergonomics, as well as quality, documentation, and manuals. "The safety interlock should automatically bring the equipment or related parts to a safe state when activated. (11.3)" ⇒ Example: Opening the door during operation will cause the equipment to lose power. Additionally, the equipment will not regain power until the door is closed. "The safety interlock system must be fault-tolerant, (continued) (11.5)" ⇒ Fault tolerance means that it operates safely in the event of a reasonably foreseeable single failure. The above is just a small example from SEMI S2. *For more details, please refer to the PDF document or feel free to contact us.
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In 1992, our company was established by engineers engaged in safety management and quality control of nuclear power plants as a company that conducts safety and quality inspections of industrial machinery. In the following year, 1993, we began our business in SEMI guideline compliance evaluation. Since then, based on our experience in the SEMI business and the know-how cultivated in the engineering and semiconductor field, we provide total support related to the safety of semiconductor manufacturing equipment, including: 1. Safety evaluation services as a third-party organization (SEMI S2/S8, CE marking, etc.) 2. Creation and translation of product documentation 3. Creation and sales of warning labels Our company tests and evaluates product safety from the design stage and responds to our customers' diverse safety requirements with a "One Stop" solution. The testing items cover a wide range, including mechanical, electrical, EMC (electromagnetic compatibility), F47/F42 evaluation tests, chemical (tracer gas tests, etc.), pressure, and environmental aspects. Additionally, for hazardous energy that cannot be eliminated from the product, we provide follow-up with warning labels and documentation. We offer a consistent service that includes safety reviews, warning labels, and product manuals.