SEMI S2: Guidelines for Environment, Health, and Safety
Introducing some guidelines related to environment, health, and safety, such as safety interlocks.
The "SEMI S2" outlines the minimum considerations that must be taken into account regarding the working environment, hygiene, and safety for equipment used in semiconductor manufacturing. The requirements cover areas such as chemicals, radiation, electricity, physics, mechanics, environment, fire, earthquakes, exhaust, ergonomics, as well as quality, documentation, and manuals. "The safety interlock should automatically bring the equipment or related parts to a safe state when activated. (11.3)" ⇒ Example: Opening the door during operation will cause the equipment to lose power. Additionally, the equipment will not regain power until the door is closed. "The safety interlock system must be fault-tolerant, (continued) (11.5)" ⇒ Fault tolerance means that it operates safely in the event of a reasonably foreseeable single failure. The above is just a small example from SEMI S2. *For more details, please refer to the PDF document or feel free to contact us.
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