SEMI S14: Safety Guidelines for Fire Risk Assessment and Mitigation
Safety guidelines for fire risk assessment and mitigation for semiconductor manufacturing equipment.
"SEMI S14" provides considerations that assist in assessing and mitigating the risks of fire and combustion by-products related to equipment and products. It applies to asset protection but not to human protection. In the "SEMI S10" risk assessment, the fire risk assessment for equipment is delegated to "SEMI S14." On the other hand, it is recommended to use the methods from SEMI S10 for estimating risks. As a fundamental premise, it identifies the three elements of fire: fuel, oxidizer, and ignition source. By removing one or more of these three elements, the fire risk can be eliminated. It provides detailed descriptions of the considerations to be taken into account when conducting risk assessments regarding fuel, oxidizers, and ignition sources. *For more details, please refer to the PDF document or feel free to contact us.*
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