SEMI S10: Safety Guidelines for Risk Assessment Processes
Introducing safety guidelines for the risk assessment and risk evaluation process.
The purpose of "SEMI S10" is to establish general principles for risk assessment to identify hazards, estimate risks, and evaluate risks in a consistent and practical manner. Additionally, by using "SEMI S10," it helps determine the degree of risk and develop measures to control that risk. 【Example of Risk Assessment】 ■ Conducted a risk assessment at a wafer transport equipment manufacturer ■ Identified the hazard of crushing by robots within the wafer transport equipment and estimated it as risk rank 2C ■ Referenced SEMI S2 for risk reduction measures and added a door interlock function ■ Concluded with a risk rank of "none" *For more details, please refer to the PDF document or feel free to contact us.
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