DC power supply for sputtering 'GEXUS'
Evolving high performance and high reliability! A DC power supply that adopts a multi-stage inverter method and achieves extremely low arc energy.
"GEXUS" is a DC power supply for sputtering that adopts a multi-stage inverter system, achieving extremely low arc energy. It offers a wide range of outputs from 1.5kW to 20kW. By operating multiple units in tandem, it is possible to achieve a maximum output of 240kW. Additionally, there is a 3kW DC power supply for sputtering, "GEXUS-H3A," which realizes low output starting from 30W. It can be used for various film deposition applications including semiconductors, power devices, and SiC. 【Features】 ■ High reliability, low failure rate ■ High-speed arc extinguishing device available as an option ■ High-speed interruption during arcing (interruption within 1us) ■ Low arc energy (less than 1mJ/kW) *For more details, please download the PDF or feel free to contact us.
basic information
【Features of GEXUS DC Power Supply for Spattering】 ■GEXUS-1.5: Output 1.5kW, ultra-thin design (1U: 43.5mm) ■GEXUS-H3A: Output 3kW, supports low output from 30W. Local operation via the operation panel is possible. ■GEXUS-15: Output 15kW. Also available in 6kW and 10kW types. Local operation control option available. Options compliant with standards such as NRTL and CE are available. ■GEXUS-20: Output 20kW, supports high output through tandem operation (Max 240kW). ■GEXUS-ARC: High-speed arc extinguishing device. Achieves a height of 1U (43.5mm). Available lineup that allows 2-channel connection in the same shape. Can be easily installed by simply connecting in parallel to the output of our DC power supply. *For more details, please download the PDF or feel free to contact us.
Price range
Delivery Time
Model number/Brand name
GEXUS
Applications/Examples of results
【Applications】 ■ Semiconductor film deposition ■ Sputtering Semiconductor, power devices, SiC, and various other film depositions ■ Bias * For more details, please download the PDF or feel free to contact us.
