Power supply for film formation (sputtering)
Low failure rate and high reliability! An arc suppressor is available as an option.
We would like to introduce the "Film Formation (Sputtering) Power Supply" that we handle. The unit's output ranges from 1.5kW to 20kW, and it can support up to 300kW through master-slave operation. Additionally, it features high-speed interruption during arcing and low arc energy, with an optional arc suppressor available. 【Features】 ■ High reliability (low failure rate) ■ Optional arc suppressor available ■ High-speed interruption during arcing (interruption within 1us) ■ Low arc energy (less than 1mJ/kW) *For more details, please download the PDF or feel free to contact us.
basic information
【Specifications】 ■ Output Voltage - 800V ■ Output Current - 40A *For more details, please download the PDF or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Usage】 ■Power supply for semiconductor film deposition ■Power supply for sputtering *For more details, please download the PDF or feel free to contact us.
