Hot plate unit
Precision temperature control, cleanroom manufacturing. Heaters supporting next-generation semiconductors.
This is a heater with a structure that sandwiches a mica heater between aluminum plates. It is manufactured in a Class 10,000 cleanroom, achieving a uniform temperature distribution. It is mainly used in the wafer resist coating and drying processes within semiconductor manufacturing equipment. 【Material Specifications】 ■ Material: AL ■ Material: SUS ■ Material: SIC *For more details, please download the PDF or feel free to contact us.
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