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White Light Interferometer IMS5600-DS

It is a white light interferometer that can be measured in a vacuum environment and in a clean room.

Absolute distance measurement with nanometer precision High resolution of 30 picometers Sensors and cables suitable for vacuum environments

Related Link - https://www.sankyointernational.co.jp/products/int…

basic information

(Specifications) Range: 0 to 2.1 mm Output: Analog: 4-20 mA, 0-10 V Digital: RS422/EtherCAT/Ethernet Resolution: <30 pm Accuracy: < ±10 nm Response: 100 Hz to 6 kHz Temperature: 5 to 70 ℃ Measurement objects: Glass, reflective surfaces, diffuse surfaces, etc.

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Applications/Examples of results

Measurement in a vacuum environment and in a clean room.

White Light Interferometer IMS5600-DS

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