White Light Interferometer IMS5400-TH
It is a white light interferometer for stable thickness measurement with sub-micrometer accuracy.
Measurement of thickness with nanometer precision for measuring targets with distance variations and vibrations. Stable measurement of anti-reflective coated glass is also possible. Easy setup via a web interface.
basic information
(Specifications) Range: 0.035 to 1.4 mm *However, the target must be within a range of 45 mm ± 3.5 mm from the sensor Output: Analog: 4-20 mA, 0-10 V Digital: RS422/EtherCAT/Ethernet Resolution: <1 nm Accuracy: < ±100 nm Responsiveness: 100 Hz to 6 kHz Temperature: 5 to 70 ℃ Measurement objects: Thin layers, glass, films, etc.
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Applications/Examples of results
Measurement of thickness with nanometer precision for objects with distance variations and vibrations. Glass with anti-reflective coating can also be measured stably.
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