Programmer Glo-Spatter Coater SC-701HMCII
Compatible with Ni/Cr/W and more! Achieving high-precision control through software control.
The "SC-701HMCII" is a magnetron-type programmable sputter coater suitable for the fabrication of thin films such as W (tungsten), Ni (nickel), Cr (chromium), and Ti (titanium). It offers two modes of operation: full auto and manual, catering to all needs from beginner to professional use. The system control via software allows for finer and significantly more precise control of film deposition conditions. It comes standard with an automatic shutter mechanism. 【Features】 ■ Two modes of operation: full auto / manual ■ High-precision control system ■ Standard shutter device → Automatically opens/closes in conjunction with the set program ■ Real-time monitoring ■ Compact desktop-sized body For more details, please contact us or download the catalog.
basic information
【Specifications】 ○ Target size: φ49 mm ○ Sample stage size: φ70 mm ○ Exhaust operation: Automatic ○ Sputtering method: DC sputtering, magnetron type ○ Sputtering current/voltage: 0–50 mA / 0–3 kV (system controlled) ○ Chamber size: 160 (φ) × 160 (D) mm (made of SUS) ○ Gas introduction mechanism: Needle valve (system controlled) ○ Exhaust device: Direct connection rotary pump 100 l/min (with automatic leak) ○ Power supply: Single-phase AC 100V 50/60Hz 10A ○ Dimensions & weight ・Main unit: 360 (W) / 422 (D) / 265 (H) mm, 20 kg ・RP: 460.5 (W) / 173.5 (D) / 264 (H) mm, 22.4 kg ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications and Examples of Achievements】 ○ As a DC sputtering device → Film formation of W/Ni/Cr/Ti, etc. → Fundamental experiments for fuel cells ● For more details, please contact us.
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